%PDF-1.3
%
1 0 obj
<>]/Pages 3 0 R/Type/Catalog/ViewerPreferences<>>>
endobj
2 0 obj
<>stream
uuid:f92e2c90-d8d5-9245-8130-d641551649a5
adobe:docid:indd:4146aa81-fc5a-11de-b2d8-ab86333a78f2
xmp.id:30e11b23-9faf-4206-a35f-68f22ec4997d
proof:pdf
1
xmp.iid:8f554b33-6934-4a61-9863-583a2bd02a4d
xmp.did:D2170E19AB206811822ABACFA91144F2
adobe:docid:indd:4146aa81-fc5a-11de-b2d8-ab86333a78f2
default
converted
from application/x-indesign to application/pdf
Adobe InDesign 15.0 (Macintosh)
/
2020-02-27T09:37:11+01:00
2020-02-27T09:37:11+01:00
2020-02-27T09:37:12+01:00
2020-02-27T09:37:12+01:00
Adobe InDesign 15.0 (Macintosh)
application/pdf
Kleindiek Nanotechnik GmbH
(c) Kleindiek Nanotechnik GmbH
gis.20.02.indd
True
Adobe PDF Library 15.0
False
PDF/X-3:2002
PDF/X-3:2002
PDF/X-3:2002
endstream
endobj
3 0 obj
<>
endobj
6 0 obj
</LastModified/NumberofPages 1/OriginalDocumentID/PageUIDList<0 7683>>/PageWidthList<0 595.276>>>>>>/Resources<>/ExtGState<>/Font<>/ProcSet[/PDF/Text/ImageC]/XObject<>>>/TrimBox[14.1732 14.1732 609.449 856.063]/Type/Page>>
endobj
7 0 obj
<>stream
BT
0 0 0 1 k
/Perceptual ri
/GS0 gs
/T1_0 1 Tf
0.05 Tc 0.122 Tw 9 0 0 9 99.2126 671.811 Tm
[(T)4 (he GIS-EM plug-in f)15 (or the MM\037A micr)11 (omanipu-)]TJ
0.113 Tw 0 -1.575 Td
[(lat)6 (or is the smallest gas injec)-10.9 (tion syst)5.9 (em on the)50.1 ( )]TJ
0 Tw 0 -1.575 Td
[(mar)-8 (k)-10.9 (et t)6 (o dat)6.1 (e)10 (.)50 ( )]TJ
-0.083 Tw 0 -26.772 Td
[(T)4 (his unique t)6 (ool consists of a heat)6 (ed r)11 (eser)-30 (v)7 (oir with)50 ( )]TJ
-0.048 Tw 0 -1.575 Td
[(t)6 (emperatur)11 (e contr)11 (ol)11 (, a pr)11 (opor)-25.9 (tional valv)7 (e which )0.5 (is)50 ( )]TJ
0.109 Tw 0 -1.575 Td
[(ac)-11 (tuat)6 (ed b)5 (y a NanoM)-8 (ot)6 (or )0.5 (f)15 (or ultimat)5.9 (e pr)11 (ecision,)50 ( )]TJ
0.159 Tw 0 -1.575 Td
[(and a no)6 (zzle which is positioned pr)11 (ecisely o)5 (v)6.9 (er)50 ( )]TJ
0 Tw 0 -1.575 Td
[(the ar)10.9 (ea of int)6 (er)11 (est using the micr)11 (omanipulat)6 (or)45 (.)50 ( )]TJ
-0.045 Tw 0 -4.724 Td
[(T)4 (he )0.5 (no)6 (zzle)26 (\222)58 (s tip is )0.5 (slant)6 (ed f)15 (or )0.5 (an optimal geometr)-30 (y)50 ( )]TJ
-0.036 Tw 0 -1.575 Td
[(of )0.5 (the )0.5 (gas )0.5 (flo)5 (w )0.5 (and )0.5 (has )0.5 (a )0.5 (small )0.5 (aper)-26 (tur)11 (e )0.5 (at )0.5 (the )0.5 (t)6 (op)50.1 ( )]TJ
0.07 Tw 0 -1.575 Td
[(which allo)5 (ws ir)-7 (radiating the ar)10.9 (ea of int)6 (er)11 (est with)50.1 ( )]TJ
0 Tw 0 -1.575 Td
[(the elec)-11 (tr)11 (on or ion beam.)]TJ
0.204 Tw 25.197 45.669 Td
[(F)30 (illing )0.5 (the )0.5 (r)11 (eser)-30 (v)7 (oir )0.5 (can )0.5 (be )0.5 (achie)-4 (v)7 (ed )0.5 (b)5 (y )0.5 (simply)50.1 ( )]TJ
0.319 Tw 0 -1.575 Td
[(r)11 (emo)5 (ving its cap and intr)11 (oducing the desir)11 (ed)50 ( )]TJ
0.245 Tw 0 -1.575 Td
[(pr)11 (ecursor mat)6 (er)-7 (ial)10.9 (. )42.1 (T)33 (ypical mat)6 (er)-7 (ials ar)11 (e: )35.1 (W)28 (at)6.1 (er)45 (,)50 ( )]TJ
1.158 Tw 0 -1.575 Td
[(Hexane)10 (, )-41.8 (Naphthalene)10 (, T)40 (ungst)6 (enhexacar)-8 (bon-)]TJ
0.223 Tw 0 -1.575 Td
[(yl)11 (, )0.6 (or )0.6 (Iodine )0.6 (- )0.6 (but )0.6 (pr)11 (ett)-10.9 (y )0.5 (much )0.5 (an)10 (ything )0.6 (goes!)]TJ
-0.042 Tw 0 -1.575 Td
[(T)4 (he pr)10.9 (ecursors ma)6.1 (y be heat)6 (ed t)6 (o a t)6 (emperatur)11 (e of)50.1 ( )]TJ
0.058 Tw 0 -1.575 Td
[(up t)6 (o \036\035\260C in or)11 (der f)15 (or them t)6 (o e)-4 (vaporat)6 (e)10 (. Using)50 ( )]TJ
0.08 Tw 0 -1.575 Td
[(the valv)7 (e)26 (\222)58 (s fine contr)11 (ol)11 (, the amount of gas intr)11 (o)-14 (-)]TJ
0 Tw 0 -1.575 Td
[(duced int)6 (o the chamber can be finely tuned)11 (.)]TJ
0 -4.724 Td
[(R)-5 (eplacing the cap with an inlet allo)5 (ws intr)11 (oduc-)]TJ
0 -1.575 Td
[(ing gaseous substances such as Ar)9 (gon, Ox)-12 (y)7 (gen,)50 ( )]TJ
0 -1.575 Td
[(or gas mix)-13 (tur)11 (es)11.1 (.)]TJ
0 1 1 0 k
/GS1 gs
/T1_1 1 Tf
-0.05 Tw 0 -4.724 Td
[(A)3 (pplica)4 (tions)]TJ
/C2_0 1 Tf
0 Tc 0 Tw 0.157 -1.575 Td
<0083>Tj
0 0 0 1 k
/GS0 gs
/T1_0 1 Tf
0.05 Tc 0.787 0 Td
[(D)-6 (epositing metal or car)-8 (bon struc)-11 (tur)11 (es)]TJ
0 1 1 0 k
/GS1 gs
/C2_0 1 Tf
0 Tc -0.787 -1.575 Td
<0083>Tj
0 0 0 1 k
/GS0 gs
/T1_0 1 Tf
0.05 Tc 0.787 0 Td
[(A)4 (t)6 (omic La)6 (y)7 (er D)-6 (eposition)]TJ
0 1 1 0 k
/GS1 gs
/C2_0 1 Tf
0 Tc -0.787 -1.575 Td
<0083>Tj
0 0 0 1 k
/GS0 gs
/T1_0 1 Tf
0.05 Tc 0.787 0 Td
[(Char)9 (ge compensation)]TJ
0 1 1 0 k
/GS1 gs
/T1_1 1 Tf
-0.945 -4.724 Td
[(T)71 (echnical specifica)4 (tions)]TJ
/C2_0 1 Tf
0 Tc 0.157 -1.575 Td
<0083>Tj
0 0 0 1 k
/GS0 gs
/T1_0 1 Tf
0.05 Tc 0.787 0 Td
[(R)-5 (eser)-30 (v)7 (oir v)7 (olume: \035.\034 cm)]TJ
0 Tc 6 0 0 6 434.3147 348.8268 Tm
(\037)Tj
0 1 1 0 k
/GS1 gs
/C2_0 1 Tf
9 0 0 9 327.4016 331.6535 Tm
<0083>Tj
0 0 0 1 k
/GS0 gs
/T1_0 1 Tf
0.05 Tc 0.787 0 Td
[(M)-8 (ax. t)6.1 (emperatur)11 (e: \036\035\260C)]TJ
0 1 1 0 k
/GS1 gs
/T1_1 1 Tf
-0.945 -4.724 Td
[(F)35 (ur)-24 (ther inf)13 (or)-4 (ma)4 (tion)]TJ
/C2_0 1 Tf
0 Tc 0.157 -1.575 Td
<0083>Tj
0 0 0 1 k
/GS0 gs
/T1_0 1 Tf
0.05 Tc 0.787 0 Td
[(C)6 (ontac)-10.9 (t us at)]TJ
0 1 1 0 k
/GS1 gs
[( inf)15 (o@k)-22 (leindiek)-20 (.com)50 ( )]TJ
/C2_0 1 Tf
0 Tc -0.787 -1.575 Td
<0083>Tj
0 0 0 1 k
/GS0 gs
/T1_0 1 Tf
0.05 Tc 0.787 0 Td
[(F)30 (ind y)7 (our local agent at )]TJ
0 1 1 0 k
/GS1 gs
-0.05 Tw [(w)-8 (w)-7.9 (w)34 (.k)-22 (leindiek)-20 (.com)]TJ
ET
0 0 0 0 K
0.5 w 4 M
q 1 0 0 1 478.9433 165.1225 cm
0 0 m
6.782 0 l
S
Q
q 1 0 0 1 478.9433 166.2475 cm
0 0 m
0 -2.25 l
S
Q
q 1 0 0 1 485.725 166.2475 cm
0 0 m
0 -2.25 l
S
Q
BT
0 0 0 1 k
/GS0 gs
0 Tc 0 Tw 0 6 -6 0 606.2106 196.1698 Tm
[(All t)6 (echnical speci\033)242.1 ( )-23 (cations ar)11.1 (e appr)11 (o)8 (ximat)6 (e)10.1 (. Due t)6 (o continuous de)-3.9 (v)7 (elopment, w)7.1 (e r)11 (eser)-29.9 (v)7 (e the r)-7 (ight t)6.1 (o change speci\033)242.1 ( )-23 (cations without notice)10.1 (. )35 (V)26 (ersion \032\035.\035\034. \251 K)-15.9 (leindiek Nanot)6.1 (echnik GmbH.)]TJ
ET
q
439.37 155.905 85.039 70.866 re
W n
q
/GS1 gs
87.1343514 0 0 72.7529494 438.3226145 154.8690599 cm
/Im0 Do
Q
Q
q
325.984 155.905 85.039 70.866 re
W n
q
/GS1 gs
85.0393647 0 0 72.2502515 325.9842529 154.8812182 cm
/Im1 Do
Q
Q
q
212.599 155.905 85.039 70.866 re
W n
q
/GS1 gs
85.0393647 0 0 71.9180617 212.5984497 154.8535448 cm
/Im2 Do
Q
Q
q
99.212 155.905 85.039 70.866 re
W n
q
/GS1 gs
85.0393647 0 0 71.9180617 99.2126465 154.8535448 cm
/Im3 Do
Q
Q
BT
0 6 -6 0 606.2106 196.4578 Tm
[(All t)6 (echnical speci\033)242.1 ( )-23 (cations ar)11.1 (e appr)11 (o)8 (ximat)6 (e)10.1 (. Due t)6 (o continuous de)-3.9 (v)7 (elopment, w)7.1 (e r)11 (eser)-29.9 (v)7 (e the r)-7 (ight t)6.1 (o change speci\033)242.1 ( )-23 (cations without notice)10.1 (. )35 (V)26 (ersion \032\035.\035\032. \251 K)-15.9 (leindiek Nanot)6.1 (echnik GmbH.)]TJ
0 0 0 0 k
/GS1 gs
/T1_1 1 Tf
0.2 Tc 7 0 0 7 473.0697 164.146 Tm
(\037 \265m)Tj
-16.218 0 Td
(\036 \265m)Tj
-16.971 0 Td
(\037\035\035 \265m)Tj
-15.608 0 Td
(\037 mm)Tj
ET
q 1 0 0 1 470.0215 159.7241 cm
0 0 m
24.625 0 l
S
Q
q 1 0 0 1 470.0215 160.8491 cm
0 0 m
0 -2.25 l
S
Q
q 1 0 0 1 494.6468 160.8491 cm
0 0 m
0 -2.25 l
S
Q
q 1 0 0 1 356.1913 159.7241 cm
0 0 m
24.625 0 l
S
Q
q 1 0 0 1 356.1913 160.8491 cm
0 0 m
0 -2.25 l
S
Q
q 1 0 0 1 380.8166 160.8491 cm
0 0 m
0 -2.25 l
S
Q
q 1 0 0 1 242.8055 159.7241 cm
0 0 m
24.625 0 l
S
Q
q 1 0 0 1 242.8055 160.8491 cm
0 0 m
0 -2.25 l
S
Q
q 1 0 0 1 267.4308 160.8491 cm
0 0 m
0 -2.25 l
S
Q
q 1 0 0 1 129.4196 159.7241 cm
0 0 m
24.625 0 l
S
Q
q 1 0 0 1 129.4196 160.8491 cm
0 0 m
0 -2.25 l
S
Q
q 1 0 0 1 154.0449 160.8491 cm
0 0 m
0 -2.25 l
S
Q
q
19.656 535.928 100.307 66.055 re
W n
q
100.4817157 0 0 66.2305516 19.4814987 535.9282008 cm
/Im4 Do
Q
Q
q
119.788 535.928 100.395 66.055 re
W n
q
100.3943429 0 0 66.2305516 119.7884598 535.9282008 cm
/Im5 Do
Q
Q
q
220.008 535.928 100.308 66.055 re
W n
q
100.4817157 0 0 66.2305516 220.0080414 535.9282008 cm
/Im6 Do
Q
Q
q
19.656 470.047 100.307 66.055 re
W n
q
100.4817157 0 0 66.2305516 19.4814987 469.8724147 cm
/Im7 Do
Q
Q
q
119.788 470.047 100.395 66.055 re
W n
q
100.3943429 0 0 66.2305516 119.7884598 469.8724147 cm
/Im8 Do
Q
Q
q
220.008 470.047 100.308 66.055 re
W n
q
100.4817157 0 0 66.2305516 220.0080414 469.8724147 cm
/Im9 Do
Q
Q
0.157 0.114 0.106 0 k
0 830.552 623.622 25.511 re
f
q
0 0 623.622 870.236 re
W n
0.157 0.114 0.106 0 K
20 w 10 M
q 1 0 0 1 0 858.436 cm
0 0 m
623.622 0 l
S
Q
Q
BT
0 0 0 1 k
/GS0 gs
/T1_0 1 Tf
9 0 0 9 178.7518 839.9321 Tm
[(S)-5 (canning E)3 (lec)-10.9 (tr)11 (on & F)34 (ocused Ion B)-3 (eam M)-16 (icr)11 (oscop)5 (y)]TJ
ET
0.157 0.114 0.106 0 k
/GS1 gs
0 830.552 623.622 25.511 re
f
q
0 0 623.622 870.236 re
W n
0.157 0.114 0.106 0 K
20 w 10 M
q 1 0 0 1 0 858.436 cm
0 0 m
623.622 0 l
S
Q
Q
BT
0 0 0 1 k
/GS0 gs
9 0 0 9 178.7518 839.9321 Tm
[(S)-5 (canning E)3 (lec)-10.9 (tr)11 (on & F)34 (ocused Ion B)-3 (eam M)-16 (icr)11 (oscop)5 (y)]TJ
/T1_2 1 Tf
0.01 Tc 20 0 0 20 70.8661 750.7677 Tm
[(GIS)-9 (-EM G)-8 (as I)-6 (njec)-15 (tion S)12 (y)12 (st)6 (em)]TJ
ET
0 1 0.9 0 k
/GS1 gs
427.929 61.929 5.635 5.635 re
f
q 1 0 0 1 404.3952 91.0791 cm
0 0 m
0 -23.687 l
16.672 -23.687 l
16.672 -16.637 l
23.688 -16.637 l
23.688 0 l
h
f
Q
0 0 0 1 k
q 1 0 0 1 437.0375 74.4922 cm
0 0 m
2.146 0 l
2.146 5.865 l
2.193 5.865 l
6.509 0 l
9.203 0 l
4.602 6.39 l
8.798 11.349 l
6.104 11.349 l
2.146 6.819 l
2.146 16.451 l
0 16.451 l
h
f
Q
448.552 74.492 2.146 16.451 re
f
q
403.41 60.944 121 31.001 re
W n
q 1 0 0 1 462.3726 76.3042 cm
0 0 m
-0.501 -0.167 -1.168 -0.405 -2.146 -0.405 c
-5.246 -0.405 -6.319 2.575 -6.319 4.697 c
0.262 4.697 l
0.262 5.246 l
0.262 7.916 -1.073 9.799 -3.839 9.799 c
-5.293 9.799 -8.464 9.275 -8.464 4.411 c
-8.464 -0.048 -6.271 -2.074 -2.837 -2.074 c
-1.598 -2.074 -0.93 -1.907 0 -1.693 c
h
-6.223 6.128 m
-6.223 6.628 -5.722 8.13 -3.958 8.13 c
-2.313 8.13 -1.884 6.843 -1.884 6.128 c
h
f*
Q
465.778 74.492 2.146 11.349 re
465.563 88.512 2.575 2.432 re
f*
q 1 0 0 1 471.9442 74.4922 cm
0 0 m
2.146 0 l
2.146 4.816 l
2.146 7.081 3.386 9.465 5.15 9.465 c
6.7 9.465 6.7 8.297 6.7 6.199 c
6.7 0 l
8.846 0 l
8.846 7.868 l
8.846 9.275 8.416 11.611 5.794 11.611 c
3.481 11.611 2.575 9.871 2.194 8.917 c
2.146 8.917 l
2.146 11.349 l
0 11.349 l
h
f
Q
q 1 0 0 1 490.8234 74.4922 cm
0 0 m
2.146 0 l
2.146 16.451 l
0 16.451 l
0 9.776 l
-0.048 9.776 l
-0.31 10.443 -1.192 11.611 -3.076 11.611 c
-5.651 11.611 -7.081 9.251 -7.081 5.484 c
-7.081 2.241 -5.961 -0.262 -3.195 -0.262 c
-1.216 -0.262 -0.286 1.097 -0.048 1.74 c
0 1.74 l
h
-4.697 5.675 m
-4.697 8.059 -4.148 9.942 -2.479 9.942 c
-0.572 9.942 0 7.677 0 5.698 c
0 3.815 -0.715 1.407 -2.456 1.407 c
-4.458 1.407 -4.697 3.958 -4.697 5.675 c
f*
Q
496.953 74.492 2.146 11.349 re
496.739 88.512 2.575 2.432 re
f*
q 1 0 0 1 510.7731 76.3042 cm
0 0 m
-0.501 -0.167 -1.168 -0.405 -2.146 -0.405 c
-5.245 -0.405 -6.318 2.575 -6.318 4.697 c
0.262 4.697 l
0.262 5.246 l
0.262 7.916 -1.073 9.799 -3.839 9.799 c
-5.293 9.799 -8.464 9.275 -8.464 4.411 c
-8.464 -0.048 -6.271 -2.074 -2.837 -2.074 c
-1.597 -2.074 -0.93 -1.907 0 -1.693 c
h
-6.223 6.128 m
-6.223 6.628 -5.722 8.13 -3.958 8.13 c
-2.313 8.13 -1.883 6.843 -1.883 6.128 c
h
f*
Q
q 1 0 0 1 513.94 74.4922 cm
0 0 m
2.146 0 l
2.146 5.865 l
2.194 5.865 l
6.509 0 l
9.203 0 l
4.602 6.39 l
8.798 11.349 l
6.104 11.349 l
2.146 6.819 l
2.146 16.451 l
0 16.451 l
h
f
Q
q 1 0 0 1 437.0247 62.0357 cm
0 0 m
0.574 0 l
0.574 2.091 l
0.574 3.584 1.321 5.043 2.298 5.043 c
3.263 5.043 3.263 4.009 3.263 3.447 c
3.263 0 l
3.837 0 l
3.837 4.044 l
3.837 5.422 2.711 5.595 2.413 5.595 c
1.091 5.595 0.77 4.653 0.597 4.124 c
0.574 4.124 l
0.574 5.468 l
0 5.468 l
h
f
Q
q 1 0 0 1 448.8735 62.0357 cm
0 0 m
0.574 0 l
0.574 3.734 l
0.574 4.469 0.551 5.595 -1.137 5.595 c
-2.585 5.595 -3.021 4.733 -3.021 4.159 c
-2.321 4.159 l
-2.229 4.595 -2.045 5.043 -1.183 5.043 c
-0.747 5.043 -0.184 4.905 -0.046 4.251 c
0 4.055 0 3.377 0 3.09 c
-0.678 3.079 -3.113 3.09 -3.113 1.332 c
-3.113 0.724 -2.803 -0.126 -1.723 -0.126 c
-0.724 -0.126 -0.23 0.471 -0.023 0.77 c
0 0.77 l
h
0 2.539 m
0 1.907 -0.08 1.631 -0.253 1.321 c
-0.505 0.908 -1.034 0.563 -1.608 0.563 c
-2.033 0.563 -2.424 0.839 -2.424 1.31 c
-2.424 2.148 -1.585 2.539 -0.574 2.539 c
h
f*
Q
q 1 0 0 1 454.8145 62.0357 cm
0 0 m
0.574 0 l
0.574 2.091 l
0.574 3.584 1.321 5.043 2.298 5.043 c
3.263 5.043 3.263 4.009 3.263 3.447 c
3.263 0 l
3.837 0 l
3.837 4.044 l
3.837 5.422 2.711 5.595 2.413 5.595 c
1.091 5.595 0.77 4.653 0.597 4.124 c
0.574 4.124 l
0.574 5.468 l
0 5.468 l
h
f
Q
q 1 0 0 1 465.8592 61.9094 cm
0 0 m
1.551 0 2.229 1.264 2.229 2.849 c
2.229 4.446 1.551 5.721 0 5.721 c
-1.551 5.721 -2.252 4.446 -2.252 2.849 c
-2.252 1.264 -1.551 0 0 0 c
-1.562 2.78 m
-1.562 4.055 -1.206 5.17 -0.035 5.17 c
1.137 5.17 1.539 4.055 1.539 2.78 c
1.539 1.505 1.137 0.551 -0.035 0.551 c
-1.206 0.551 -1.562 1.505 -1.562 2.78 c
f*
Q
q 1 0 0 1 475.4934 62.7939 cm
0 0 m
-0.149 -0.046 -0.367 -0.08 -0.551 -0.08 c
-1.356 -0.08 -1.425 0.494 -1.425 0.988 c
-1.425 3.906 l
0.092 3.906 l
0.092 4.71 l
-1.425 4.71 l
-1.425 6.64 l
-2.458 5.997 l
-2.458 4.71 l
-3.435 4.71 l
-3.435 3.906 l
-2.458 3.906 l
-2.458 0.448 l
-2.458 -0.299 -2.137 -0.885 -0.816 -0.885 c
-0.54 -0.885 -0.264 -0.862 0 -0.804 c
h
f
Q
q 1 0 0 1 483.2435 62.9087 cm
0 0 m
-0.241 -0.08 -0.563 -0.195 -1.034 -0.195 c
-2.528 -0.195 -3.044 1.241 -3.044 2.263 c
0.126 2.263 l
0.126 2.527 l
0.126 3.814 -0.517 4.722 -1.849 4.722 c
-2.55 4.722 -4.078 4.469 -4.078 2.125 c
-4.078 -0.023 -3.021 -0.999 -1.367 -0.999 c
-0.77 -0.999 -0.448 -0.919 0 -0.816 c
h
-2.998 2.952 m
-2.998 3.194 -2.757 3.917 -1.907 3.917 c
-1.114 3.917 -0.908 3.297 -0.908 2.952 c
h
f*
Q
q 1 0 0 1 491.3749 62.8283 cm
0 0 m
-0.299 -0.092 -0.586 -0.115 -0.873 -0.115 c
-2.596 -0.115 -3.044 1.252 -3.044 2.332 c
-3.044 3.343 -2.608 3.998 -1.93 3.998 c
-1.172 3.998 -1.091 3.308 -1.091 2.895 c
0.092 2.895 l
0.092 3.791 -0.31 4.802 -1.861 4.802 c
-3.492 4.802 -4.193 3.665 -4.193 2.137 c
-4.193 0.781 -3.607 -0.919 -1.516 -0.919 c
-0.873 -0.919 -0.402 -0.839 0 -0.712 c
h
f
Q
q 1 0 0 1 495.4054 62.0357 cm
0 0 m
1.034 0 l
1.034 2.321 l
1.034 3.412 1.632 4.561 2.482 4.561 c
3.228 4.561 3.228 3.998 3.228 2.987 c
3.228 0 l
4.262 0 l
4.262 3.791 l
4.262 4.469 4.055 5.595 2.792 5.595 c
1.677 5.595 1.241 4.756 1.057 4.297 c
1.034 4.297 l
1.034 7.927 l
0 7.927 l
h
f
Q
q 1 0 0 1 504.2953 62.0357 cm
0 0 m
1.034 0 l
1.034 2.321 l
1.034 3.412 1.631 4.561 2.481 4.561 c
3.228 4.561 3.228 3.998 3.228 2.987 c
3.228 0 l
4.262 0 l
4.262 3.791 l
4.262 4.469 4.055 5.595 2.791 5.595 c
1.677 5.595 1.241 4.756 1.057 4.297 c
1.034 4.297 l
1.034 5.468 l
0 5.468 l
h
f
Q
513.3 62.036 1.034 5.468 re
513.196 68.791 1.241 1.172 re
f*
q 1 0 0 1 519.0855 62.0357 cm
0 0 m
1.034 0 l
1.034 2.826 l
1.057 2.826 l
3.136 0 l
4.435 0 l
2.217 3.079 l
4.239 5.468 l
2.941 5.468 l
1.034 3.285 l
1.034 7.927 l
0 7.927 l
h
f
Q
Q
endstream
endobj
15 0 obj
<>stream
Adobe d C
. 0l
E9 ! 1A"Qa2q#BR3Cb
$%&'()*456789:DEFGHIJSTUVWXYZcdefghijrstuvwxyz ? ?=0Đ1V{.b@$xkRT%^=Nh{]d dxil wIJثųfw֟p +暑9&HMn%:=dN;cZ˺yy&H&Wdc{=ɵRWak^<1@xePH6L` A8ױVV@ARrϯ>~Ta-A&q+ 2!z`Y ́߯BMC0& U ;H&AN^ )7,A?^Tvfz2$n^˲TQoeb$=3|RA[Tl@oX^FV
f"#$
$4?WUVc<5YXDDf%uZ
YYr(i&`ݒyϜ,w#kZ=Vagmd@j
E!f4E0KIIV!vC$LNNP3Iqi[+W"Ax4(P7eOeLol@[uCM$R `k⤐UyG1#P)Rc߽iHI0N0N
dAgmjhKEΨf&dE;"`+R,1 xccIpF=|5j!ReUB3χbi3- \ r4>ο?B*H4ZL`n->bP`ФSd'^T1| "v#pʰ'=5F
2 ƱTu '
PSD'@UTuehc1<#-kakHj!m2L E:1 dF@g^>Ka˒H!w.^ A;Fg3X\A\n5dQsU.09HLoCnac3ؗDbj !F;89k:!ffbR;1ƽLs3=juL c^eϬ}fSA. 8ϯJxKamA3#_BT5TA第KZo=qk*RfDk;( L<=bRzy d"ykҼ(V$Dn嶳SGe ']n8JAX7`gb;n]wzp!bF*y@JMYpQxdž#_;GT ;8S
#9Ө@V R$LD@ 0|AבɫRL}}cdv c ;0h Umc[٨A1#uԡ HRgUrQKg}=ᒱY/h'rLL+;Ɇ$ ă<-e+M@m.rFDwbWH
JQ$utvn)/Hφ4J4/0%pI~i:C5(RQab L&ڪI0ͱiiܳ& o52U0a<5$U!_(QL$0 I1XV!3zW]!ŦDrLuchN72}q=`zW .&bok
UqkTZq$ݯbj2!IV$x{ 9 6-9^`&ܓ tZ9\|6*g` q06弍a&VJjU w6&p1bI`NF *_+V`(7d`G8p2f@ رMY 4B(y EO}o_'jr,%TN5x* Eӿ#ZYD fA